By expert representatives from global semiconductor manufacturers and related experts, the Institute of Electrical and Electronics Engineers (IEEE) International Roadmap for Devices and Systems (IRDS) establishes a comprehensive strategic framework for advanced hardware acceleration, microelectronics, and computing systems.
It represents a collective multi-stakeholder consensus engineered by expert representatives from global semiconductor manufacturers, original equipment manufacturers (OEMs), materials suppliers, and analytical research laboratories.
Ultimately, the roadmaps operate as the definitive technological baselines for many aspects of semidconductor manufacturing. They are thus useful for evaluating modern fabrication capabilities(Ang and Liao forthcoming, 2026) and guiding scaling trajectories within global value chains(Liao and Ang forthcoming, 2026).
Focusing on sustainability on and around the semiconductor facilities, the Environment, Safety, Health & Sustainability (ESHS) chapter of the roadmap defines quantitative benchmarks and actionable targets for building climate-resilient fabrication facilities[Liao and Ang (forthcoming, 2026)](Ang and Liao forthcoming, 2026).
Grounded in facility-monitoring, it outlines critical tracking metrics including freshwater usage, evaporative water losses, hazardous waste generation, and energy consumption factors. However, contemporary reviews identify ongoing technology gaps within the roadmap, particularly regarding real-time chemical intensity tracking, Scope 1 greenhouse gas tool abatement, and Scope 3 supply-chain footprint blind spots.
Semiconductor facilities become important sites of practice and research for smart sustainable manufacturing to integrate best Industry 5.0 with advanced RegTech and FinTech (Ang and Liao forthcoming, 2026; Liao et al. 2026).
The IRDS framework explicitly cross-references established SEMI standards to govern manufacturing sustainability metrics, particularly leveraging the SEMI S Series (Safety, Environmental & Energy) to calculate Equivalent Energy Consumption Factors (Liao and Ang forthcoming, 2026).
This coordination establishes unified financial and environmental benchmarking metrics, allowing technology managers to balance tool-level operational constraints with localized utility realities.
Other relevant SEMI standards consists of SEMI MF Series (Metrology), SEMI T Series (Traceability) and SEMI F Series (Facilities). Also SEMI MS Series and SEMI C Series can have specific material flow requirements for the SEMI M Series (Wafers & Process Control) to implement a System of Systems (SoS) orchestration.